KOMICO LTD.
16Patents
15Active
16Granted
63Portfolio score
Filing activity: Dec 4, 2002 → Jun 22, 2023 · 4 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6833279B2 | Method of fabricating and repairing ceramic components for semiconductor fabrication using plasma spray process | Emerging Cross-Sectional Technologies | 24 | Expired |
| US7473661B2 | Method for preparing a sintered body of aluminum nitride | Electricity | 3 | Active |
| US7375045B2 | High dense sintered body of aluminum nitride, method for preparing the same and member for manufacturing semiconductor using the sintered body | Electricity | 2 | Active |
| US8080813B2 | Ion implanter, internal structure of ion implanter and method of forming a coating layer in the ion implanter | Electricity | 1 | Active |
| US10272467B2 | Aerosol coating method and plasma-resistant member formed by the same | Chemistry; Metallurgy | 1 | Active |
| US8496770B2 | Method of manufacturing multilayer ceramic substrates | Emerging Cross-Sectional Technologies | 1 | Active |
| US10431488B2 | Lift pin and method for manufacturing same | Electricity | 1 | Active |
| US12378654B2 | Method of forming plasma-resistant coating layer with low brightness using heat treatment process of rare-earth metal compound powder | Performing Operations; Transporting | 0 | Active |
| US9963772B2 | Interior material for thin film deposition device and method for manufacturing same | Electricity | 0 | Active |
| US11795547B2 | Method of aerosol deposition coating for plasma resistant coating | Electricity | 0 | Active |
| US12265010B2 | Particle measuring device | Physics | 0 | Active |
| US11312637B1 | Yittrium granular powder for thermal spray and thermal spray coating produced using the same | Chemistry; Metallurgy | 0 | Active |
| US12018385B2 | Material for plasma spray comprising Y—O—F compound, method for producing the same, and spray coating prepared using the same | Chemistry; Metallurgy | 0 | Active |
| US11827975B2 | Photoplasma etching apparatus having improved plasma-resistant and manufacturing method therefor using a thermal diffusion phenomenon of a rare-earth metal thin film | Electricity | 0 | Active |
| US11473181B2 | Yittrium granular powder for thermal spray and thermal spray coating produced using the same | Chemistry; Metallurgy | 0 | Active |
| US11560319B1 | Manufacturing method for spherical YOF-based powder, and spherical YOF-based powder and YOF-based coating layer manufactured thereby | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.