Shape inspection method, shape inspection apparatus, and program
US10274314B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 2016 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | May 13, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/10152
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
[Object] To provide a shape inspection method, a shape inspection apparatus, and a program capable of adjusting the brightness and the thickness of a light-section line in a light-section image more simply and objectively.[Solution] A shape inspection method according to the present invention includes: a light-section image generation step in which linear laser light is applied to an object surface from a laser light source and a light-section line based on the laser light on the object surface is imaged by an imaging apparatus, and thereby a light-section image that is a captured image used for a light-section method is generated; an indicator value calculation step in which a thickness indicator value indicating a thickness of the light-section line and a brightness indicator value indicating a brightness of the light-section line in the light-section image are calculated; a setting changing step in which setting of at least one of the laser light source and the imaging apparatus is changed so that each of the calculated thickness indicator value and the calculated brightness indicator value is within a prescribed range uniquely set in advance; and a shape inspection step in whic…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.