Adaptive groove focusing and leveling device and method
US10274840B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2015 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Jan 7, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7034
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is an adaptive groove focusing and leveling device for measuring the height and the inclination of the surface of a measured object (400). The measured object (400) is provided with cyclic grooves (401) in the surface and supported by a moving table; the focusing and leveling device sequentially comprises an illumination unit, a projection unit, a detection unit and a detector (212); the measured object (400) is positioned between the projection unit and the detection unit along the light path, the projection unit comprises a projection slit (203) and is used for forming a plurality of measuring points (501) on the measured object (400), and each measuring point (501) comprises at least three measuring child light spots (502), wherein the at least three measuring child light spots (502) are arranged at unequal intervals, so that when the plurality of measuring points (501) are projected to the surface of the measured object (400), at least two of the at least three measuring child light spots (502) of each measuring point (501) can be positioned outside the grooves (401), and then the height and the inclination of the surface of the measured object (400) are measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.