Power supply apparatus able to control output current and power supply method using the same
US10276344B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2017 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Jul 31, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02M5/42
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A power supply apparatus able to control an output current for maintaining plasma in a plasma generator includes: a switching power supply including a rectifier, an inverter, and a phase shifter; a plasma source connected to the switching power supply and generating the plasma in the plasma generator; a resonance network connected between the switching power supply and the plasma source and including a resonance inductor connected to a primary winding in series and a resonance capacitor connected to the plasma source in parallel and connected to the resonance inductor in series; and a control unit controlling the switching power supply in order to phase-shift a voltage and a current provided to the resonance network.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.