Patent assignee · KR · COMPANY

NEW POWER PLASMA CO., LTD.

24Patents
22Active
24Granted
51Portfolio score

Filing activity: Nov 19, 2004 → Nov 7, 2022 · 6 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7952048B2 Plasma source with discharge inducing bridge and plasma processing system using the same Electricity 19 Active
US8018163B2 Capacitively coupled plasma reactor Electricity 12 Active
US9054146B2 Substrate transfer equipment and high speed substrate processing system using the same Emerging Cross-Sectional Technologies 8 Active
US9170295B2 Method and apparatus for detecting arc in plasma chamber Physics 5 Active
US7285916B2 Multi chamber plasma process system Electricity 5 Expired
US10395897B1 Virtual impedance auto matching method Electricity 4 Active
US10410834B1 Reverse power reducing method and plasma power apparatus using the same Electricity 3 Active
US10276344B2 Power supply apparatus able to control output current and power supply method using the same Electricity 3 Active
US10818474B1 RF generator and its operating method Emerging Cross-Sectional Technologies 2 Active
US9773645B2 Remote plasma generator using ceramic Electricity 2 Active
US8597464B2 Inductively coupled plasma reactor with multiple magnetic cores Electricity 2 Active
US10276351B1 High-frequency power generator with enhanced pulse function Electricity 2 Active
USRE45527E1 Inductively coupled plasma reactor with multiple magnetic cores General 1 Active
US9151393B2 Two way gate valve and substrate processing system having the same Electricity 1 Active
US7477022B2 System and method for driving a multi-lamp Electricity 1 Active
US12183545B2 Plasma reactor Electricity 1 Active
US7611585B2 Plasma reaction chamber with a built-in magnetic core Electricity 1 Expired
US10548211B2 Resonant network for plasma power supply and power supply device for plasma generator Emerging Cross-Sectional Technologies 0 Active
US12228605B2 Module type sensor for detecting voltage and current of radio frequency signal on PCB transmission line Electricity 0 Active
US11728142B2 Apparatus for conducting plasma surface treatment, board treatment system having the same Electricity 0 Active
US8083892B2 Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same Emerging Cross-Sectional Technologies 0 Active
US8961736B2 Plasma reactor with internal transformer Electricity 0 Active
US11189471B2 High frequency generator having dual outputs and its driving method Electricity 0 Active
US12283464B2 Plasma reaction device Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.