NEW POWER PLASMA CO., LTD.
24Patents
22Active
24Granted
51Portfolio score
Filing activity: Nov 19, 2004 → Nov 7, 2022 · 6 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7952048B2 | Plasma source with discharge inducing bridge and plasma processing system using the same | Electricity | 19 | Active |
| US8018163B2 | Capacitively coupled plasma reactor | Electricity | 12 | Active |
| US9054146B2 | Substrate transfer equipment and high speed substrate processing system using the same | Emerging Cross-Sectional Technologies | 8 | Active |
| US9170295B2 | Method and apparatus for detecting arc in plasma chamber | Physics | 5 | Active |
| US7285916B2 | Multi chamber plasma process system | Electricity | 5 | Expired |
| US10395897B1 | Virtual impedance auto matching method | Electricity | 4 | Active |
| US10410834B1 | Reverse power reducing method and plasma power apparatus using the same | Electricity | 3 | Active |
| US10276344B2 | Power supply apparatus able to control output current and power supply method using the same | Electricity | 3 | Active |
| US10818474B1 | RF generator and its operating method | Emerging Cross-Sectional Technologies | 2 | Active |
| US9773645B2 | Remote plasma generator using ceramic | Electricity | 2 | Active |
| US8597464B2 | Inductively coupled plasma reactor with multiple magnetic cores | Electricity | 2 | Active |
| US10276351B1 | High-frequency power generator with enhanced pulse function | Electricity | 2 | Active |
| USRE45527E1 | Inductively coupled plasma reactor with multiple magnetic cores | General | 1 | Active |
| US9151393B2 | Two way gate valve and substrate processing system having the same | Electricity | 1 | Active |
| US7477022B2 | System and method for driving a multi-lamp | Electricity | 1 | Active |
| US12183545B2 | Plasma reactor | Electricity | 1 | Active |
| US7611585B2 | Plasma reaction chamber with a built-in magnetic core | Electricity | 1 | Expired |
| US10548211B2 | Resonant network for plasma power supply and power supply device for plasma generator | Emerging Cross-Sectional Technologies | 0 | Active |
| US12228605B2 | Module type sensor for detecting voltage and current of radio frequency signal on PCB transmission line | Electricity | 0 | Active |
| US11728142B2 | Apparatus for conducting plasma surface treatment, board treatment system having the same | Electricity | 0 | Active |
| US8083892B2 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Emerging Cross-Sectional Technologies | 0 | Active |
| US8961736B2 | Plasma reactor with internal transformer | Electricity | 0 | Active |
| US11189471B2 | High frequency generator having dual outputs and its driving method | Electricity | 0 | Active |
| US12283464B2 | Plasma reaction device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.