High-frequency power generator with enhanced pulse function
US10276351B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 6, 2018 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Nov 6, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02M3/1582
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is a high-frequency power generator with an enhanced pulse function, which supplies high-frequency power to a plasma load. The high-frequency power generator may include: a rectifier configured to receive AC power and rectify the received AC power; a DC-DC converter configured to adjust an output voltage by switching an output of the rectifier; an RF power amplifier configured to amplify an output of the DC-DC converter, and transfer high-frequency power with a pulse waveform to the plasma load; an RF power controller configured to control the output and pulse waveform of the RF power amplifier; and a DC-DC converter controller configured to receive a pulse signal from the RF power controller, and control a duty ratio of switching elements constituting the DC-DC converter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.