Inspection object imaging apparatus, inspection object imaging method, surface inspection apparatus, and surface inspection method
US10281408B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2016 |
| Grant date | May 7, 2019 |
| Priority date | — |
| Expiry date | Dec 19, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0697
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection object imaging apparatus includes: a light source configured to produce a light beam belonging to an infrared wavelength band and having a predetermined spread half-angle on a surface of an inspection object; a projection optical system to project the light beam on the surface of the inspection object at a predetermined projection angle; and an imaging unit. The imaging unit includes an imaging optical system configured to condense reflected light and branch the reflected light to two different directions, and a first image sensor and a second image sensor, the first image sensor positioned on the inspection object side with respect to a position of the imaging optical system that is conjugate with the surface of the inspection object, along an optical axis of the reflected light, and the second image sensor positioned on the reflected-light travel direction side with respect to the conjugate position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.