Patent · US Active

Probe card for testing semiconductor wafers

US10281491B2 · kind B2 · utility

1Cited by

1References

12Claims

0Family size

Assignee

TRANSLARITY, INC. · US

Inventors

Francis T. McQuade · Watertown, US
Raul Molina · Hutto, US
Michael Chrastecky · Hutto, US

Key dates

Filing date	Nov 30, 2016
Grant date	May 7, 2019
Priority date	—
Expiry date	Jan 3, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe card is disclosed. The probe card includes a first disc, a second disc, an alignment plate and multiple micro probes. One of the micro probes includes a linear segment and a curved segment connected to each other at an angle stop. The first disc includes a recessed area having multiple holes formed therein, wherein one of the holes is configured to receive the linear segment of the micro probe. The second disc includes a recessed area having multiple holes formed therein, wherein one of the holes is configured to receive the curved segment of the micro probe. Placed within the recessed area of the second disc, the alignment plate includes multiple holes formed therein, wherein one of the holes is configured to receive the curved segment of the micro probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.