Columnar laminar flow generation device and method for generating columnar laminar flows
US10286426B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 9, 2016 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | Oct 25, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6715
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall of the opening in the direction vertical to the opening; the opening has, in its interior wall, a gas blow-out port through which a gas is blown out in one direction vertical to the opening; and the gas suction path is formed in such a way that it suctions the gas in the direction opposite to the one in which the gas is blown out. The columnar laminar generation device is capable of generating columnar laminar flows.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.