Cross-linkable fluorinated photopolymer
US10289000B2 · kind B2 · utility
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31References
18Claims
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Key dates
| Filing date | Mar 19, 2018 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | Mar 19, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31127
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photosensitive composition is disclosed including a fluorinated photo cross-linkable polymer provided in a fluorinated solvent such as a hydrofluoroether. The photo cross-linkable polymer includes a first repeating unit having a fluorine-containing group but not a cinnamate group, and a second repeating unit having a fluorine-containing cinnamate group. The polymer has a total fluorine content in a range of 30 to 60% by weight. The composition can be used to form patterned barrier or dielectric structures over substrates and devices such as organic electronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.