Patent · US Active

Semiconductor packages and methods of forming same

US10290611B2 · kind B2 · utility

41Cited by
14References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 15, 2018
Grant dateMay 14, 2019
Priority date
Expiry dateMay 15, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15311
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

In an embodiment, a package includes a first package structure including a first die having a first active side and a first back-side, the first active side including a first bond pad and a first insulating layer a second die bonded to the first die, the second die having a second active side and a second back-side, the second active side including a second bond pad and a second insulating layer, the second active side of the second die facing the first active side of the first die, the second insulating layer being bonded to the first insulating layer through dielectric-to-dielectric bonds, and a conductive bonding material bonded to the first bond pad and the second bond pad, the conductive bonding material having a reflow temperature lower than reflow temperatures of the first and second bond pads.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.