Plating method and plating apparatus
US10294580B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2015 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | Mar 25, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D21/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A plating method capable of controlling a concentration of an additive within a proper range during plating of a substrate is disclosed. The plating method includes: disposing an anode and a substrate, having a via-hole formed in a surface thereof, so as to face each other in a plating solution containing an additive; applying a voltage between the anode and the substrate for filling the via-hole with metal; measuring the voltage applied to the substrate; calculating an amount of change in the voltage per predetermined time; and adjusting a concentration of the additive in the plating solution to keep the amount of change in the voltage within a predetermined control range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.