EBARA CORPORATION
2,562Patents
1,261Active
2,562Granted
56Portfolio score
Filing activity: Jul 15, 1977 → Apr 30, 2024 · 264 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5728223A | Reactant gas ejector head and thin-film vapor deposition apparatus | Chemistry; Metallurgy | 583 | Expired |
| US5950925A | Reactant gas ejector head | Chemistry; Metallurgy | 570 | Expired |
| USD634719S1 | Elastic membrane for semiconductor wafer polishing apparatus | General | 523 | Expired |
| USD649986S1 | Sealing ring | General | 420 | Expired |
| USD793976S1 | Substrate retaining ring | General | 416 | Active |
| US6861642B2 | Neutral particle beam processing apparatus | Electricity | 401 | Expired |
| USD777546S1 | Work holder for polishing apparatus | General | 391 | Active |
| US6488774B1 | Trap apparatus | Emerging Cross-Sectional Technologies | 360 | Expired |
| US6849857B2 | Beam processing apparatus | Electricity | 327 | Expired |
| US5226713A | Storage vessel | Electricity | 326 | Expired |
| USD633452S1 | Elastic membrane for semiconductor wafer polishing apparatus | General | 325 | Expired |
| US6176929A | Thin-film deposition apparatus | Chemistry; Metallurgy | 304 | Expired |
| US6464825B1 | Substrate processing apparatus including a magnetically levitated and rotated substrate holder | Chemistry; Metallurgy | 288 | Expired |
| US7126294B2 | Method and device for controlling photovoltaic inverter, and feed water device | Emerging Cross-Sectional Technologies | 260 | Expired |
| US6717189B2 | Electroless plating liquid and semiconductor device | Emerging Cross-Sectional Technologies | 258 | Expired |
| US5951923A | Vaporizer apparatus and film deposition apparatus therewith | Emerging Cross-Sectional Technologies | 254 | Expired |
| US5838447A | Polishing apparatus including thickness or flatness detector | Physics | 197 | Expired |
| US7061211B2 | Gas turbine generating apparatus | Emerging Cross-Sectional Technologies | 164 | Expired |
| US6132512A | Vapor-phase film growth apparatus and gas ejection head | Chemistry; Metallurgy | 155 | Expired |
| US4876006A | Hollow fiber filter device | Performing Operations; Transporting | 153 | Expired |
| US6442951B1 | Heat exchanger, heat pump, dehumidifier, and dehumidifying method | Mechanical Engineering; Lighting; Heating | 143 | Expired |
| US5672091A | Polishing apparatus having endpoint detection device | Performing Operations; Transporting | 143 | Expired |
| US4806080A | Pump with shaftless impeller | Emerging Cross-Sectional Technologies | 137 | Expired |
| US5073268A | Process and system for purifying pure water or ultrapure water | Emerging Cross-Sectional Technologies | 131 | Expired |
| US5846062A | Two stage screw type vacuum pump with motor in-between the stages | Mechanical Engineering; Lighting; Heating | 128 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.