Substrate processing apparatus and recording medium
US10295991B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 19, 2017 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | Sep 19, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate processing apparatus includes a data collection controller and an operation part. The data collection controller is configured to hold monitoring item list information and component management information. Each of the monitoring item list information and the component management information holds; monitoring item information indicative of a monitoring item for monitoring a maintenance component selected as a monitoring target; setting information for setting a threshold value of the maintenance component; monitoring data of the maintenance component; and monitoring information including a number of times of resetting by which the maintenance component is initialized, wherein the component management information is configured to hold the monitoring information for each unit including the maintenance component according to the monitoring item. The operation part provides the data collection controller with the monitoring data from device data collected from the unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.