Akihiko Yoneda
7Patents
2h-index
12Co-inventors
44Inventor score
Filing activity: Nov 19, 2004 → Jul 30, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7494941B2 | Manufacturing method of semiconductor device, and substrate processing apparatus | Emerging Cross-Sectional Technologies | 43 | Expired |
| US8600539B2 | Substrate processing apparatus | Physics | 4 | Active |
| US10295991B2 | Substrate processing apparatus and recording medium | Electricity | 1 | Active |
| US10290516B2 | Substrate processing apparatus, maintenance method, and maintenance program | Chemistry; Metallurgy | 1 | Active |
| US10903098B2 | Substrate processing system and substrate processing apparatus | Physics | 0 | Active |
| US7808396B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US8482426B2 | Substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.