Magnetic annealing apparatus
US10297481B2 · kind B2 · utility
0Cited by
13References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2014 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | Mar 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C11/16
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A magnetic annealing apparatus is provided which performs a magnetic annealing on workpieces held in a workpiece boat by using a horizontal superconducting magnet as a magnetic field generating unit. The magnetic annealing apparatus includes a carrier configured to accommodate the workpieces before the magnetic annealing process; and a workpiece conveyance mechanism configured to convey the workpieces held in the carrier to the workpiece boat. The workpiece conveyance mechanism is capable of holding the workpieces in either a horizontal state or in a vertical state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.