Talbot X-ray microscope
US10304580B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2018 |
| Grant date | May 28, 2019 |
| Priority date | — |
| Expiry date | Apr 16, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2207/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.