Mass spectrometer, use thereof, and method for the mass spectrometric examination of a gas mixture

US10304672B2 · kind B2 · utility

Assignees

• Carl Zeiss SMT GmbH · DE
• Carl Zeiss Microscopy GmbH · DE

Inventors

• Gennady Fedosenko · Aalen, DE
• Michel Aliman · Oberkochen, DE
• Hin Yiu Anthony Chung · Blaustein, DE
• Albrecht Ranck · Aalen, DE
• Leonid Gorkhover · Ulm, DE

Key dates

• Filing date: Dec 14, 2015
• Grant date: May 28, 2019
• Expiry date: Dec 14, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J49/147
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.