Front opening wafer container with weight ballast

US10304710B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• Eric A. Kirkland · Colorado Springs, US
• Barry Gregerson · Shorewood, US
• Eric Stephen Olson · Fort Worth, US
• Christian Andersen
• Jason T. Steffens · Shakopee, US
• Ryan Mushel · Chaska, US
• Karen L. Anderson · Peekskill, US

Key dates

• Filing date: Jun 18, 2014
• Grant date: May 28, 2019
• Expiry date: Jun 23, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67386
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Apparatuses and methods providing a ballast system for adjusting the center of gravity of a standardized front opening wafer container. Various embodiments of the disclosure present ballast systems that are low profile, do not require modifications to the shell of the wafer container, and can be retrofit to existing wafer carriers. In some embodiments, these capabilities are accomplished by a ballast that mounts to a kinematic coupling plate of the wafer container. In one embodiment, the ballasting can also provide sufficient counter force to the lifting forces associated with purging of the wafer container, thereby preventing “lift off” of the wafer container during purging operations. The ballasts can be removed for shipping of the wafer container, thereby decreasing shipping costs.