ENTEGRIS, INC.
🏢 View company profile →773Patents
621Active
773Granted
63Portfolio score
Filing activity: Oct 13, 1995 → Jun 11, 2024 · 105 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8082946B2 | Liquid flow controller and precision dispense apparatus and system | Emerging Cross-Sectional Technologies | 546 | Active |
| US9337054B2 | Precursors for silicon dioxide gap fill | Electricity | 426 | Active |
| US10395963B2 | Electrostatic chuck | Electricity | 265 | Active |
| US6923216B2 | Microfluidic device with ultraphobic surfaces | Emerging Cross-Sectional Technologies | 63 | Expired |
| USD767234S1 | Wafer support ring | General | 59 | Active |
| US7740024B2 | System and method for flow monitoring and control | Emerging Cross-Sectional Technologies | 58 | Expired |
| US7247245B1 | Filtration cartridge and process for filtering a slurry | Performing Operations; Transporting | 44 | Expired |
| US7249628B2 | Apparatus for conditioning the temperature of a fluid | Emerging Cross-Sectional Technologies | 44 | Expired |
| US6852390B2 | Ultraphobic surface for high pressure liquids | Emerging Cross-Sectional Technologies | 40 | Expired |
| US7878765B2 | System and method for monitoring operation of a pump | Mechanical Engineering; Lighting; Heating | 39 | Active |
| US6845788B2 | Fluid handling component with ultraphobic surfaces | Electricity | 39 | Expired |
| US7760104B2 | Identification tag for fluid containment drum | Performing Operations; Transporting | 38 | Active |
| US6901971B2 | Transportable container including an internal environment monitor | Emerging Cross-Sectional Technologies | 37 | Expired |
| USD783922S1 | Wafer support ring | General | 37 | Active |
| US7112237B2 | Porous sintered composite materials | Emerging Cross-Sectional Technologies | 36 | Expired |
| US7476087B2 | Pump controller for precision pumping apparatus | Mechanical Engineering; Lighting; Heating | 35 | Expired |
| US6428729B1 | Composite substrate carrier | Performing Operations; Transporting | 34 | Expired |
| US6926937B2 | Matrix tray with tacky surfaces | Emerging Cross-Sectional Technologies | 34 | Expired |
| US7547049B2 | O-ring-less low profile fittings and fitting assemblies | Mechanical Engineering; Lighting; Heating | 34 | Active |
| US7383967B2 | Apparatus and methods for pumping high viscosity fluids | Mechanical Engineering; Lighting; Heating | 34 | Expired |
| US6789781B2 | Reinforced diaphragm valve | Emerging Cross-Sectional Technologies | 32 | Expired |
| US6776289B1 | Wafer container with minimal contact | Electricity | 29 | Expired |
| US6976585B2 | Wafer carrier with ultraphobic surfaces | Electricity | 29 | Expired |
| US7063304B2 | Extended stroke valve and diaphragm | Mechanical Engineering; Lighting; Heating | 29 | Expired |
| US8172546B2 | System and method for correcting for pressure variations using a motor | Emerging Cross-Sectional Technologies | 29 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.