Probe guide plate and probe device
US10309988B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 17, 2017 |
| Grant date | Jun 4, 2019 |
| Priority date | — |
| Expiry date | Jan 17, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07371
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe guide plate includes a first silicon substrate, a first recess portion formed in an upper surface of the first silicon substrate, first through-holes formed in the first silicon substrate at a bottom of the first recess portion, a second silicon substrate directly bonded on the first silicon substrate, a second recess portion formed to face the first recess portion in a lower surface of the second silicon substrate, and second through-holes formed in the second silicon substrate at a bottom of the second recess portion and arranged to correspond to the first through-holes, A notch portion is formed at an upper end portion of an inner wall of each of the first through-holes of the first silicon substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.