Device and method for multispot scanning microscopy

US10310243B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Tiemo Anhut · Jena, DE
• Daniel Schwedt · Weimar, DE
• Tobias Kaufhold · Jena, DE
• Burkhard Roscher · Jena, DE
• Stefan Wilhelm · Unterhaching, DE

Key dates

• Filing date: Feb 8, 2017
• Grant date: Jun 4, 2019
• Expiry date: Apr 29, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F1/116
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to a device for multispot scanning microscopy, having a multicolor light source for providing at least one illumination light beam, having a splitting device for splitting the illumination light beam into a plurality of illumination sub-beams, having first optical means for providing an illumination optical path for guiding and focusing the individual illumination sub-beams respectively into a light spot on or in a specimen to be examined, having a scan unit for guiding the light spots over the probe, having a detection unit for detecting detection light emitted by the specimen in detection sub-beams after irradiation with the individual illumination sub-beams, having second optical means for providing a detection optical path for guiding the detection sub-beams to the detector unit, having a control and evaluation unit for controlling the scan unit and for evaluating the detection light detected by the detection unit. The device is characterized in that in the illumination optical path for at least two of the illumination sub-beams a controllable beam manipulation means is present for independent setting of a spectral composition of the respective illuminatio…