Patent · US Active

Method for compensating probe misplacement and probe apparatus

US10312123B2 · kind B2 · utility

0Cited by

2References

5Claims

0Family size

Assignee

MPI CORPORATION · TW

Inventors

Chen Chen · Taipei, TW
Yu-Hsun Hsu · Dashulong, TW
Po-Yi Ting · Dashulong, TW
Stojan Kanev · Sacka, DE

Key dates

Filing date	Jan 25, 2017
Grant date	Jun 4, 2019
Priority date	—
Expiry date	Jan 25, 2037

Classification

Technology area (CPC A)Human Necessities
CPC primaryA47B88/988
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for compensating probe misplacement and a probe apparatus are provided. The method is applicable to a probe module which includes a probe and a fixing base. The probe includes a probe body section and a probe tip section. The probe body section is fixed on the fixing base. The method includes: measuring a temperature of a probe body of the probe body section of the probe; calculating, according to the temperature of the probe body, thermal expansion amount of the probe along a length direction of the probe body section; calculating a compensation value according to the thermal expansion amount; moving the probe or a to-be-tested element according to the calculated compensation value, to align a probe tip of the probe tip section with the to-be-tested element or align the to-be-tested element with the probe tip of the probe tip section.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.