Patent · US Active

Delivery device, manufacturing system and process of manufacturing

US10316408B2 · kind B2 · utility

5Cited by

31References

18Claims

0Family size

Assignees

Silcotek Corp. · US
AIXTRON SE · DE

Inventors

David A. SMITH · Bellefonte, US
Min YUAN · Hsinchu, TW
James B. Mattzela · State College, US
Olaf Martin WURZINGER · Übach-Palenberg, DE
Dietmar Keiper · Aachen, DE
Anna Katharina Haab · Würselen, DE

Key dates

Filing date	Nov 19, 2015
Grant date	Jun 11, 2019
Priority date	—
Expiry date	Dec 31, 2035

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/4404
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A delivery device, manufacturing system, and process of manufacturing are disclosed. The delivery device includes a feed tube and a chemical vapor deposition coating applied over an inner surface of the feed tube, the chemical vapor deposition coating being formed from decomposition of dimethylsilane. The manufacturing system includes the delivery device and a chamber in selective fluid communication with the delivery device. The process of manufacturing uses the manufacturing system to produce an article.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.