Patent · US Active

Method for manufacturing semiconductor structure

US10319644B2 · kind B2 · utility

1Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 16, 2017
Grant dateJun 11, 2019
Priority date
Expiry dateMar 16, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8503
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

In some embodiments, a semiconductor structure includes a first device and a second device. The first device has a first surface. The first device includes a first active region defined by a first material system. The second device has a second surface. The second surface is coplanar with the first surface. The second device includes a second active region defined by a second material system. The second material system is different from the first material system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.