Three-way microvalve device and method of fabrication
US10323772B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 1, 2015 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Oct 1, 2035 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0082
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A three-way (3-way) Micro-Electro-Mechanical Systems (MEMS)-based micro-valve device and method of fabrication for the implementation of a three-way MEMS-based micro-valve are disclosed. The micro-valve device has a wide range of applications, including medical, industrial control, aerospace, automotive, consumer electronics and products, as well as any application(s) requiring the use of three-way micro-valves for the control of fluids. The discloses three-way micro-valve device and method of fabrication that can be tailored to the requirements of a wide range of applications and fluid types, and can also use a number of different actuation methods, including actuation methods that have very small actuation pressures and energy densities even at higher fluidic pressures. This is enabled by a novel pressure-balancing scheme, wherein the fluid pressure balances the actuator mechanism so that only a small amount of actuation pressure (or force) is needed to switch the state of the actuator and device from open to closed, or closed to open.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.