Michael A. Huff
47Patents
10h-index
21Co-inventors
75Inventor score
Filing activity: Aug 13, 1990 → Jul 5, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6815739B2 | Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Electricity | 175 | Expired |
| US5164558A | Micromachined threshold pressure switch and method of manufacture | Emerging Cross-Sectional Technologies | 151 | Expired |
| US5238223A | Method of making a microvalve | Mechanical Engineering; Lighting; Heating | 106 | Expired |
| US5142781A | Method of making a microvalve | Emerging Cross-Sectional Technologies | 60 | Expired |
| US7045440B2 | Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Electricity | 36 | Expired |
| US6909589B2 | MEMS-based variable capacitor | Electricity | 35 | Expired |
| US7012327B2 | Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates | Electricity | 22 | Expired |
| US7188530B2 | Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure | Physics | 14 | Expired |
| US7024936B2 | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure | Physics | 12 | Expired |
| US8304324B2 | Low-temperature wafer bonding of semiconductors to metals | Electricity | 12 | Active |
| US6622558B2 | Method and sensor for detecting strain using shape memory alloys | Physics | 8 | Expired |
| US7017419B2 | Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure | Physics | 7 | Expired |
| US8660157B2 | Means for improved implementation of laser diodes and laser diode arrays | Electricity | 5 | Active |
| US8852378B2 | Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices | Electricity | 4 | Active |
| US10323772B2 | Three-way microvalve device and method of fabrication | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US9852870B2 | Method for the fabrication of electron field emission devices including carbon nanotube field electron emisson devices | Electricity | 3 | Active |
| US7052926B2 | Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method | Performing Operations; Transporting | 2 | Expired |
| US9646878B2 | Method for fabricating and manufacturing micro—and nano-fabricated devices and systems securely | Electricity | 2 | Active |
| US9053929B1 | Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress states | Electricity | 2 | Active |
| US11326717B1 | Three-way piezoelectrically-actuated microvalve device and method of fabrication | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US8983414B2 | Versatile communication system and method of implementation using heterogeneous integration | Electricity | 1 | Active |
| US9576773B2 | Method for etching deep, high-aspect ratio features into glass, fused silica, and quartz materials | Electricity | 1 | Active |
| US7679042B1 | Fabrication of transducer structures | Electricity | 1 | Active |
| US8270081B2 | Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objects | Performing Operations; Transporting | 1 | Active |
| US10403463B2 | Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.