Performance extraction set
US10325752B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2018 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Mar 27, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/2236
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An extraction set including an extraction plate, a blocker and the holding mechanism for the blocker is disclosed. The extraction set includes an extraction plate that may be constructed of titanium coated with a ceramic material. The extraction plate is attached to the ion source using pins. The extraction plate also includes raised outline in its inner surface which is used to secure the blocker to the inner surface of the extraction plate. The ends of the blocker are secured by two holders disposed on opposite sides of the extraction aperture. The mechanism used for attaching the extraction plate to the ion source also improves the temperature uniformity of the extraction plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.