Patent · US Active

Apparatus and system for detecting wafer damage

US10325796B2 · kind B2 · utility

2Cited by

2References

20Claims

0Family size

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · TW

Inventors

Yi-Feng James Chen · Irvine, US
Yan Cing Lin · Hsinchu, TW
Chui-Ya Peng · Hsinchu, TW

Key dates

Filing date	Oct 30, 2017
Grant date	Jun 18, 2019
Priority date	—
Expiry date	Oct 30, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/12
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An apparatus includes a holder configured to carry one or more semiconductor wafers, an arm coupled with the holder, and a detector coupled with either the holder or the arm. The detector is configured to measure a change in weight of the one or more semiconductor wafers. The detector includes a strain gauge weight sensor, a piezoelectric sensor, or any other suitable sensor. The change in weight of the one or more semiconductor wafers is used to determine any possible presence of a broken or missing wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.