Protecting an interior of a hollow body with an ALD coating
US10329662B2 · kind B2 · utility
1Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 3, 2014 |
| Grant date | Jun 25, 2019 |
| Priority date | — |
| Expiry date | Mar 3, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45555
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus and method for protecting an interior of a hollow body, where an inlet and exhaust manifold include a port assembly attachable to an opening of the hollow body is provided. The interior of the hollow body is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the opening into the interior of the hollow body, and excess gases is pumped via the opening and the port assembly out from the hollow body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.