Method for producing a micromechanical component

US10336610B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Heiko Stahl · Reutlingen, DE
• Andreas Scheurle · Leonberg, DE
• Hendrik Specht · Rübgarten, DE
• Marlene Winker · Reutlingen, DE
• Ralf Hausner · Reutlingen, DE
• Volker Schmitz · Pfullingen, DE

Key dates

• Filing date: Oct 23, 2017
• Grant date: Jul 2, 2019
• Expiry date: Oct 23, 2037

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C99/0035
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method for producing a micromechanical component is provided, In a preparatory step, a substrate device of the micromechanical component and/or a cap device of the micromechanical component is patterned. In a first sub-step, a first pressure and/or a first chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a first cavern is formed, sealed from an environment of the micromechanical component, the first pressure prevailing in the first cavity and/or the first chemical composition being enclosed. In a second sub-step, a second pressure and/or a second chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a second cavity is formed, sealed from the environment of the micromechanical component and from the first cavity, the second pressure prevailing in the second cavity and/or the second chemical composition being enclosed.