Automated TEM sample preparation

US10340119B2 · kind B2 · utility

Assignee

• FEI Company · US

Inventors

• Valerie Brogden · Portland, US
• Jeffrey Blackwood · Portland, US
• Michael Schmidt · Gresham, US
• Dhruti Trivedi · Watervliet, US
• Richard Young · Bradenton, US
• Thomas G. Miller · Portland, US
• Brian Roberts Routh, Jr. · Beaverton, US
• Stacey Stone · Brno, CZ
• Todd Templeton · Banks, US

Key dates

• Filing date: Mar 20, 2017
• Grant date: Jul 2, 2019
• Expiry date: Mar 20, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/31745
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.