Patent · US Active

Polymer, organic layer composition, and method of forming patterns

US10340148B2 · kind B2 · utility

1Cited by
1References
18Claims
0Family size

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Key dates

Filing dateSep 14, 2016
Grant dateJul 2, 2019
Priority date—
Expiry dateJan 28, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/0035
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A polymer, an organic layer composition, and a method of forming patterns, the polymer including a structural unit represented by Chemical Formula 1:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.