Method for manufacturing workpieces and apparatus
US10347515B2 · kind B2 · utility
17Cited by
50References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 6, 2014 |
| Grant date | Jul 9, 2019 |
| Priority date | — |
| Expiry date | May 9, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
For vacuum treatment of workpieces by a multitude of distinct processing stations (P11-P1n, P21-P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.