Semiconductor devices
US10347641B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 16, 2017 |
| Grant date | Jul 9, 2019 |
| Priority date | — |
| Expiry date | Nov 16, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/34
Abstract
A semiconductor device includes a substrate including a cell region and peripheral region and bottom electrodes on the substrate. The bottom electrodes are arranged in a first row and a second row each extending in a first direction. The first row and the second row are adjacent to each other in a second direction perpendicular to the first direction. The bottom electrodes in the first row include an outermost bottom electrode and a next outermost bottom electrode that are separated by a first distance in the first direction. The bottom electrodes in the second row include an outermost bottom electrode and a next outermost bottom electrode that are separated by a second distance in the first direction. The outermost bottom electrode in the first row is on the peripheral region of the substrate. The outermost bottom electrode in the second row is on the cell region of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.