Gas sensor

US10365208B2 · kind B2 · utility

Assignees

• Infineon Technologies AG · DE
• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Stefan Kolb · Unterschleißheim, DE
• Alfons Dehe · Reutlingen, DE
• Jochen Huber · Wolfach, DE
• Franz Jost · Stuttgart, DE
• Horst Theuss · Wenzenbach, DE
• Wilhelm Wiedmeier · Augsburg, DE
• Juergen Woellenstein · Glückstadt, DE

Key dates

• Filing date: Mar 24, 2016
• Grant date: Jul 30, 2019
• Expiry date: Dec 7, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/0256
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Shown is a gas sensor including a sensor element, a measurement chamber and an emitter element. The sensor element has a MEMS membrane which is arranged in a first substrate region. Furthermore, the measurement chamber is embodied to receive a measurement gas.