Patent · US Active

System and method for a variable flow transducer

US10367430B2 · kind B2 · utility

2Cited by

9References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

David Tumpold · Tauberbischofsheim, DE
Alfons Dehe · Reutlingen, DE
Christoph Glacer · Munich, DE

Key dates

Filing date	Jan 11, 2016
Grant date	Jul 30, 2019
Priority date	—
Expiry date	Mar 9, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

According to an embodiment, a microelectromechanical systems MEMS transducer includes a deflectable membrane attached to a support structure, an acoustic valve structure configured to cause the deflectable membrane to be acoustically transparent in a first mode and acoustically visible in a second mode, and an actuating mechanism coupled to the deflectable membrane. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.