System and method for generating multi-channel tunable illumination from a broadband source
US10371626B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2016 |
| Grant date | Aug 6, 2019 |
| Priority date | — |
| Expiry date | Dec 21, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0683
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A metrology system includes an illumination source to generate an illumination beam, a multi-channel spectral filter, a focusing element to direct illumination from the single optical column to a sample, and at least one detector to capture the illumination collected from the sample. The multi-channel spectral filter includes two or more filtering channels having two or more channel beam paths. The two or more filtering channels filter illumination propagating along the two or more channel beam paths based on two or more spectral transmissivity distributions. The multi-channel spectral filter further includes a channel selector to direct at least a portion of the illumination beam into at least one selected filtering channel to filter the illumination beam. The multi-channel spectral filter further includes at least one beam combiner to combine illumination from the two or more filtering channels to a single optical column.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.