Inventor · Timrat, IL

Ohad Bachar

27Patents
6h-index
69Co-inventors
68Inventor score

Filing activity: Aug 31, 2010 → Sep 8, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8441639B2 Metrology systems and methods Physics 32 Active
US9080971B2 Metrology systems and methods Physics 15 Active
US9581430B2 Phase characterization of targets Physics 12 Active
US8873054B2 Metrology systems and methods Physics 12 Active
US10203247B2 Systems for providing illumination in optical metrology Electricity 9 Active
US9958385B2 Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology Physics 8 Active
US8582114B2 Overlay metrology by pupil phase analysis Physics 5 Active
US10677588B2 Localized telecentricity and focus optimization for overlay metrology Physics 4 Active
US9091650B2 Apodization for pupil imaging scatterometry Physics 4 Active
US9164397B2 Optics symmetrization for metrology Physics 4 Active
US9784987B2 Apodization for pupil imaging scatterometry Physics 3 Active
US10371626B2 System and method for generating multi-channel tunable illumination from a broadband source Physics 3 Active
US10422508B2 System and method for spectral tuning of broadband light sources Physics 3 Active
US10444161B2 Systems and methods for metrology with layer-specific illumination spectra Physics 2 Active
US10831108B2 Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology Electricity 2 Active
US9341769B2 Spectral control system Physics 2 Active
US9512985B2 Systems for providing illumination in optical metrology Electricity 2 Active
US11353321B2 Metrology system and method for measuring diagonal diffraction-based overlay targets Physics 1 Active
US10533940B2 Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology Physics 1 Active
US11156846B2 High-brightness illumination source for optical metrology Physics 1 Active
US9921050B2 Spectral control system Physics 0 Active
US11187838B2 Spectral filter for high-power fiber illumination sources Physics 0 Active
US11852590B1 Systems and methods for metrology with layer-specific illumination spectra Physics 0 Active
US10976562B2 Nano-structured non-polarizing beamsplitter Physics 0 Active
US11454894B2 Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.