Process for producing carbon nanotubes and method for forming wiring
US10378104B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | May 11, 2016 |
| Grant date | Aug 13, 2019 |
| Priority date | — |
| Expiry date | Jul 18, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carbon nanotube producing method, which is capable of realizing a low resistant depth-wise wiring. An acetylene gas is first supplied as a carbon-containing gas and subsequently, an ethylene gas is supplied as the carbon-containing gas such that carbon nanotubes are produced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.