Patent · US Active

Wafer-based charged particle accelerator, wafer components, methods, and applications

US10383205B2 · kind B2 · utility

2Cited by
3References
5Claims
0Family size

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Key dates

Filing dateMay 4, 2017
Grant dateAug 13, 2019
Priority date
Expiry dateMay 4, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05H2007/045
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

A wafer-based charged particle accelerator includes a charged particle source and at least one RF charged particle accelerator wafer sub-assembly and a power supply coupled to the at least one RF charged particle accelerator wafer sub-assembly. The wafer-based charged particle accelerator may further include a beam current-sensor. The wafer-based charged particle accelerator may further include at least a second RF charged particle accelerator wafer sub-assembly and at least one ESQ charged particle focusing wafer. Fabrication methods are disclosed for RF charged particle accelerator wafer sub-assemblies, ESQ charged particle focusing wafers, and the wafer-based charged particle accelerator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.