Probe guide plate and probe device
US10386387B2 · kind B2 · utility
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2References
13Claims
0Family size
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Key dates
| Filing date | Jan 12, 2017 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Nov 6, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe guide plate includes a first silicon substrate having first through-holes formed therein, an insulation layer formed on the first silicon substrate and having an opening on a region in which the first through-holes are arranged, a second silicon substrate arranged on the insulation layer and having second through-holes formed at positions corresponding to the first through-holes, and a silicon oxide layer formed on exposed surfaces of the first silicon substrate and the second silicon substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.