Patent · US Active

Optical system

US10386733B2 · kind B2 · utility

1Cited by

2References

21Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Rolf Freimann · Aalen, DE
Juergen Baier · Oberkochen, DE
Steffen Fritzsche · Tholey, DE

Key dates

Filing date	Dec 8, 2017
Grant date	Aug 20, 2019
Priority date	—
Expiry date	Dec 8, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame. Related components and methods are also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.