Patent · US Active

Side storage pods, equipment front end modules, and methods for processing substrates

US10388547B2 · kind B2 · utility

11Cited by

4References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Devendra Channappa Holeyannavar · Bengaluru, IN
Sandesh Doddamane Ramappa · Kanchinakote, IN
Dean C. Hruzek · Cedar Park, US
Michael R. Rice · Pleasanton, US
Jeffrey A. Brodine · Los Gatos, US

Key dates

Filing date	Jun 23, 2017
Grant date	Aug 20, 2019
Priority date	—
Expiry date	Jun 23, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67207
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Electronic device processing systems including side storage pods are described. One electronic device processing system has a side storage pod having a first chamber configured to receive a side storage container; a panel having a panel opening; the panel configured to be coupled between a side storage container and an equipment front end module; a side storage container received in the first chamber; and an exhaust conduit configured to be coupled to the side storage container received and extending to an exterior of the first chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.