X-ray device and manufacturing method of structure
US10393678B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2015 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | Jan 1, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/646
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a device capable of suppressing a drop in detection accuracy, and a manufacturing method of a structure. A detection device is a device that irradiates a subject with X-rays and detects the X-rays transmitting through the subject, and includes an X-ray source that emits X-rays, a table that holds the subject, a detector that detects at least a portion of the transmitted X-rays emitted from the X-ray source and transmitted through the subject, and a first guide device and a second guide device that guide movement of the table in a direction parallel to an optical axis of the X-ray source while supporting the table. In this detection device, a guide plane, which is parallel to the optical axis and is a plane to which the movement of the table is regulated, passes through the inside of a detection region of the transmitted X-rays of the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.