Pellicle film including graphite-containing thin film for extreme ultraviolet lithography
US10394117B2 · kind B2 · utility
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7References
20Claims
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Key dates
| Filing date | May 11, 2018 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | May 11, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pellicle film for extreme ultraviolet (EUV) lithography includes a graphite-containing thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.