Mun Ja Kim
23Patents
2h-index
47Co-inventors
53Inventor score
Filing activity: Nov 3, 2009 → Jan 4, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9703186B2 | Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipment | Physics | 6 | Active |
| US10437143B2 | Pellicle for exposure to extreme ultraviolet light, photomask assembly, and method of manufacturing the pellicle | Physics | 2 | Active |
| US9690190B2 | Pellicles and methods of manufacturing the same | Chemistry; Metallurgy | 2 | Active |
| US10065402B2 | Method of manufacturing pellicle assembly and method of photomask assembly including the same | Electricity | 2 | Active |
| US10001700B2 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Physics | 1 | Active |
| US8110979B2 | Inorganic electroluminescence device, display apparatus having the same and method thereof | Electricity | 1 | Active |
| US11262648B2 | Pellicle for photomask and method of fabricating the same | Physics | 0 | Active |
| US10747104B2 | Method of manufacturing pellicle and apparatus for assembling pellicle | Physics | 0 | Active |
| US12346022B2 | Method of fabricating pellicle structure | Physics | 0 | Active |
| US10809614B2 | Pellicle for photomask and method of fabricating the same | Physics | 0 | Active |
| US11067887B2 | Apparatus for manufacturing pellicle | Physics | 0 | Active |
| US12258494B2 | Adhesive for pellicle, pellicle for photo mask and method for manufacturing the same | Chemistry; Metallurgy | 0 | Active |
| US11448957B2 | Pellicle transfer apparatus and method | Physics | 0 | Active |
| US12018183B2 | Adhesive composition, method for preparing the same, reticle assembly including the same, and method for fabricating reticle assembly including the same | Chemistry; Metallurgy | 0 | Active |
| US9176375B2 | Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuit | Physics | 0 | Active |
| US11892767B2 | Stud attachment device and stud attachment method with independent temperature/pressure control | Physics | 0 | Active |
| US11073757B2 | Methods of manufacturing pellicle assembly and photomask assembly | Physics | 0 | Active |
| US10345698B2 | Method for fabricating semiconductor device | Electricity | 0 | Active |
| US10969702B2 | Extreme ultraviolet lithography apparatus | Physics | 0 | Active |
| US10103071B2 | Pattern inspection methods and methods of fabricating reticles using the same via directing charged particle beams through discharge layers | Electricity | 0 | Active |
| US12297379B2 | Adhesive composition, method for preparing the same, reticle assembly including the same, and method for fabricating reticle assembly including the same | Chemistry; Metallurgy | 0 | Active |
| US11729896B2 | Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system | Physics | 0 | Active |
| US10394117B2 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.