Electrostatic chuck
US10395963B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 17, 2016 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | Jul 8, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N13/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of protrusions extending to a height above portions of the surface layer surrounding the protrusions to support the substrate upon the protrusions during electrostatic clamping of the substrate. The protrusions are substantially equally spaced across the surface layer as measured by a center to center distance between pairs of neighboring protrusions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.