Method and apparatus for gas flow control
US10401202B2 · kind B2 · utility
6Cited by
91References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2016 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | Jun 8, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for controlling the flow of a gas, containing a controllable valve, wherein the position of the valve and the gas pressure upstream of the valve are measured and used in conjunction with a first lookup table to determine the flow rate of the gas through the valve; and a flow restrictor upstream of the controllable valve, wherein the temperature of the flow restrictor and the gas pressure upstream and downstream of the flow restrictor are measured and used in conjunction with a second lookup table to determine the flow rate of the gas through the flow restrictor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.