Joseph R. Monkowski
27Patents
13h-index
23Co-inventors
81Inventor score
Filing activity: Dec 15, 1980 → Nov 2, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4976996A | Chemical vapor deposition reactor and method of use thereof | Electricity | 591 | Expired |
| US5294778A | CVD platen heater system utilizing concentric electric heating elements | Chemistry; Metallurgy | 562 | Expired |
| US5104482A | Simultaneous glass deposition and viscoelastic flow process | Emerging Cross-Sectional Technologies | 51 | Expired |
| US5515238A | Thermoelectric module having reduced spacing between semiconductor elements | Emerging Cross-Sectional Technologies | 49 | Expired |
| US7823436B2 | Method and apparatus for in situ testing of gas flow controllers | Emerging Cross-Sectional Technologies | 30 | Active |
| US8240324B2 | Method and apparatus for in situ testing of gas flow controllers | Emerging Cross-Sectional Technologies | 26 | Active |
| US8271210B2 | Method and apparatus for enhancing in-situ gas flow measurement performance | Emerging Cross-Sectional Technologies | 23 | Active |
| US8265888B2 | Method and apparatus for enhancing in-situ gas flow measurement performance | Emerging Cross-Sectional Technologies | 22 | Active |
| US8271211B2 | Method and apparatus for enhancing in-situ gas flow measurement performance | Emerging Cross-Sectional Technologies | 21 | Active |
| US7757541B1 | Techniques for calibration of gas flows | Physics | 18 | Active |
| US5434744A | Thermoelectric module having reduced spacing between semiconductor elements | Emerging Cross-Sectional Technologies | 17 | Expired |
| US5091219A | Chemical vapor deposition method | Electricity | 17 | Expired |
| US7590498B1 | System and method for vacuum chamber leak detection | Physics | 14 | Active |
| US8857456B2 | Method and apparatus for in situ testing of gas flow controllers | Emerging Cross-Sectional Technologies | 12 | Active |
| US9400004B2 | Transient measurements of mass flow controllers | Emerging Cross-Sectional Technologies | 11 | Active |
| US8667830B2 | Method and apparatus for in situ testing of gas flow controllers | Emerging Cross-Sectional Technologies | 10 | Active |
| US8393197B2 | Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing | Physics | 8 | Active |
| US8237928B2 | Method and apparatus for identifying the chemical composition of a gas | Physics | 7 | Active |
| US7695984B1 | Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processes | Electricity | 7 | Active |
| US10401202B2 | Method and apparatus for gas flow control | Physics | 6 | Active |
| US5722158A | Method of manufacture and resulting thermoelectric module | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7873052B2 | System and method for controlling process end-point utilizing legacy end-point system | Electricity | 5 | Active |
| US7940395B2 | Method and apparatus for identifying the chemical composition of a gas | Physics | 5 | Active |
| US9983595B2 | Method and apparatus for gas flow control | Emerging Cross-Sectional Technologies | 5 | Active |
| US9523435B2 | Method and apparatus for gas flow control | Emerging Cross-Sectional Technologies | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.